The chips have a 52 Mbit volume, consist of 330 million (!) transistors with a square of only 109 mm2, and are made of 12-inch plates on lithographic equipment with the wavelength of 248 nm (old equipment) and 193 nm (new equipment). I will remind, that the serial production of the chips (including Pentium 4 CPUs) with 0.09-micron technology use is scheduled by Intel for year 2003.

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by Ilya Gavrichenkov
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