Globalfoundries to Develop Sub-22nm Process Technologies with IMEC

IMEC and Globalfoundries Team Up for Sub-22nm Fabrication Processes

by Anton Shilov
04/04/2011 | 11:09 AM

Globalfoundries, a leading contract maker of semiconductors, and IMEC, an independent research center, have signed a strategic long-term partnership on sub-22nm CMOS scaling and GaN-on-Si technology. The IMEC partnership is supplemental to the company's current R&D activities and will not diminish its commitment to any of other partners in technology development, namely IBM.


"We have a deep heritage of collaborative innovation, and joining IMEC will add another dimension to our R&D pipeline. IMEC is one of the largest semiconductor consortia in the world and a research site where many of the key technology issues on our roadmap are addressed. One key criterion for the decision is IMEC’s capabilities and resources in EUV lithography. We are committed to being a leader in high-volume EUV implementation, and we believe the collaboration with IMEC will fortify our already-strong EUV roadmap," said Jason Gorss, a spokesman for  Globalfoundries.

Globalfoundries becomes a full IMEC core CMOS partner. Imec’s sub-22nm core CMOS program aims at developing processes that can be used in high-volume manufacturing of future logic and memory ICs. The program encompasses material and device studies, tool and process step exploration, integration options and advanced characterization towards process technology platforms for the next generation of ICs, as well as exploring and developing the options for further generations.

The company will also closely collaborate on EUV lithography, device technology for logic and memory, nano-interconnects and 3D integration together with other leading integrated device manufacturers (IDMs), foundries, fabless and fablite companies, equipment and material suppliers who are part of the IMEC research ecosystem.

 Globalfoundries also joins the imec GaN research program, which aims at high-performance, cost-effective GaN devices on silicon. This program brings together leading IDMs, foundries, compound semiconductor companies, equipment suppliers and substrate suppliers to develop 8 inch GaN technology on silicon.

“Globalfoundries has long embraced a collaborative approach to R&D innovation based on a model of shared objectives and shared investments with partners around the world. The mission and capabilities of imec are highly complementary to our current collaborative R&D approach and will add another important dimension to our technology pipeline," said David Bennett, vice president of alliances at  Globalfoundries.